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Product Name: Phosphorus trihydride
Use: Mainly used in the manufacture of integrated circuit, solar battery, electron components.
Packing & Storage: Upon clients' request
Quality Specifications: Meet SEMI-C7 standard
No. |
Item |
Content |
1 |
PH3≥ |
99.999% |
2 |
N2< |
10PPm |
3 |
H2≤ |
2PPm |
4 |
O2< |
2PPm |
5 |
THC< |
3PPm |
6 |
AsH3< |
2PPm |
7 |
H2O< |
10PPm |
8 |
CO2< |
10PPm |